Machines in used metrology and inspection equipment. The kla tencor alphastep profilometer measures step heights, surface profiles and roughness using a stylus with a 12. The stylus profilometer system includes a 200 mm motorized stage, with 150 mm x 178 mm xy range of. Tencor alphastep profilometer surface profiler 020. View and download alphacom a200 user manual online. Our development series of surface profiler products is designed to match the varied requirements of our. Tencor alphastep 100 stylus profiler surplus traders. This listing is for a tencor alpha step profilometer surface profiler 020. Back to equipment list profilometer tencor alpha step 200 fablab. Kla tencor alpha step iq standard operating procedure version. When you have roughly placed the sample under the camera, use the z stage controls to lower the stylus until you can see the stylus and sample in the video window.
Available upon request refurbished and calibrated with 180day warranty condition. The alphastep 200 is a 2d stylus profilometer with 5 a vertical resolution in ka mode and 5 nm resolution in micron mode. This sop describes simple step height measurements. Tencor alpha step 500 materials research facilities network. List of wafer materials this tool can accept not list of all materials, just the wafer itself. Tencor alphastep 200 surface profiler brumley south inc. Please contact us for additional information and pricing. This manual will describe operation of this system in manual mode only. Tencor alphastep 200 profilometer the alphastep 200 is a 2d stylus profilometer with 5 a vertical resolution in ka mode and 5 nm resolution in micron mode.
If there is something you would like us to do, please let us know and we will certainly try. The latest in stateoftheart surface roughness testers profilometer, the srg4000 is designed with the shop environment in mind. The tencor alphastep 200 profilometer is a stylusbased surface profiler used to measure thin film thicknesses, step heights, etch depths, and microroughness in a range of 100 a up to 165 microns. The alphastep 200 is used to measure surface characteristics with high precision coatings, roughness, steps or depths vertical resolution 15 angst. Tencor instruments alphastep 200 users manual ebay. The d600 system includes an innovative optical lever sensor technology that provides the highest vertical range at. Klatencor alphastep 200 as200 alphastep step surface. The assigned sales representative for this part is marshall duskes who is waiting to hear from you and your requirements for this tencor alphastep 100 stylus profiler. Tencor alphastep series spare parts metrology equipment. The alphastep d100 system includes a zsensor range up to 1. We do not have the expertise to test it after that.
The klatencor development series of stylus profilers offer a complete solution focusing on the needs of the engineering and research community. Kla tencor corporation one technology drive milpitas, ca 95035 phone 408. Apr 02, 2020 back to equipment list profilometer tencor alpha step 200 fablab description the alphastep 200 is used to measure thin film thicknesses of less than 100 a up to 165 microns. Note missing some small covers and a knob as shown in the picture. Klatencorprometrix refurbished systems sold metrology. Tencor alpha step series profilers as 200, as250, as300, as500 prometrix resistivity rs series rs35, rs35a, rs55, rs55tc, rs55tca, rs75, rs100 prometrix film measurement uv series uv1050, uv1070, uv1250, us1280se, f5x, spectra fx, spectra fx100 200 tencor high resolution profiler hrp series 100, 200, 240, 300, 340. The kla tencor alpha step iq surface profilometer is a mechanical, stylusbased step profiler offering a complete suite of 2d analysis features for surface topography analysis. These surface roughness testers profilometer are distinguished by a high level of accuracy, multiple parameters and simplicity of operation. This instrument is currently equipped with a 5 micron stylus 60. Currently stocking parts for alpha step 200, 250, 300 and 500 series surface profilers. This listing is for a tencor alphastep profilometer surface profiler 020. Tencor alpha step 200 surface profiler 084999 tested.
The klatencor profilometry series includes industryleading stylus surface profilometers, stylus surface profilers, and. Alphastep birck nanotechnology center wiki confluence. Download free kla tencor profilometer manual developerspin. Find used printing and graphic equipment, woodworking equipment, machine tools, food processing machines, biotech and pharmaceutical equipment, medical equipment, ophthalmology and optic equipment, semiconductor and pcb manufacturing and more on wotol.
Alpha step 500 user manual university of notre dame. The alpha step d600 stylus profiler is capable of measuring 2d and 3d step heights from a few nanometers to 1200m. Pernollet page 1 3 epfl sti cmi alpha step 500 the alphastep 500 equipment is used to characterize a sample surface profile by scanning it with a diamond tip sensor. Kla tencor alphastep 200 is a 2d computerized stylusbased surface profiler that autolevels and autoscales step heights up to 160 ka in the ka mode or up to 160 m in the m mode. Kla tencor alphastep 200 is a 2d computerized stylusbased surface profiler that autolevels and autoscales step heights up to 160 ka. Tencor alphastep 500 surface profiler brumley south inc. Alphastep d600 stylus profiler surface profilers kla. The alphastep 200 is a computerized step profiler with a manual xy stage, and a 9 video monitor which displays a magnified view of the sample and stylus during the scan, as well as scan profiles and a summary of scan data. We have completely gone throughout the tool and replaced items that were going bad or are known to go bad in the future.
Alphastep d500 stylus profiler surface profilers kla. Parts are still available for these from brumley or perhaps someone on this list from klatencor. Alpha step d100 stylus profiler the kla tencor development series of stylus profilers offer a complete solution focusing on the needs of the engineering and research community. The alphastep d500 stylus profiler is capable of measuring 2d step heights from a few nanometers to 1200m. Get a quote now for this tencor alphastep 100 stylus profiler with 6 months extended warranty and free consultation included. Specifications 5micron 60 degree angled radius tip 30 mg stylus force profile length max 10 mm maximum step height 2 mm vertical resolution sub angstrom horizontal resolution 100 angstrom max. Details about tencor instruments alphastep 200 users manual. For information on programming the stage, semiautomatic and automatic operating modes, or menu storage, please refer to the manufacturers user operation manual available from. The tencor p10 surface profiler is a computerized, highsensitivity surface profiler that measures roughness, waviness, and step height in a variety of applications.
A sturdy reliable profilometer used for measuring film thickness, step height, and surface morphology located inside our class 100 cleanroom. It features the ability to measure microroughness with 1a 0. Kla tencor alphastep 200 profilometer materials research. Tencor alphastep 200 surface profiler salesrefurbished and fully functional to oem specifications. Step heights can range from 20nm to 160um, with scan lengths up. Operation instructions for the kla tencor p6 surface. Vertical resolution is 15 a with 160 ka range, 20 nm with 160 nm range. Currently stocking parts for alphastep 200, 250, 300 and 500 series surface profilers. Our development series of surface profiler products is designed to match the varied requirements of our customers through the delivery of full featured products.
The alphastep d100 profilometer rapidly and quantitatively measures the 2d topography of surfaces with a 30mm scan length. The alpha step 200 is used to measure step heights, etch depths, coating thicknesses, microroughness and a variety of other high precision surface characteristics. Stage should be all the way lowered before and after your use. It measures the deflection of a stylus as it is drawn over the sample. The klatencor development series of stylus profilers offer a complete solution focusing on. The system has the capability of manual single scans only. The xy stage is a manual stage the description says programmable. When you have roughly placed the sample under the camera, use the z stage controls to lower the stylus until you can see the stylus and sample in.
Tencor alpha step profilometer surface profiler 020. Pernollet page 1 3 epfl sti cmi alpha step 500 the alpha step 500 equipment is used to characterize a sample surface profile by scanning it with a diamond tip sensor. The klatencor alphastep iq profiler measures step height, waviness and roughness of a surface. Measurement of vertical features ranging from 100 nm to approximately 2 mm. Alpha 200 profilometer reva rochester institute of. Tencor alphastep 200 automatic step profiler the alphastep 200 is a computerized step profiler with a manual xy stage, and a 9 video monitor which displays a magnified view of the sample and stylus during the scan, as well as scan profiles and a summary of scan data. Scan lengths can be manually set from 10 m to 10 mm, with slow and fast scan rates. Kla tencor alphastep 200 the kla tencor alphastep profilometer measures step heights, surface profiles and roughness using a stylus with a 12. The klatencor alphastep iq surface profilometer is a mechanical, stylusbased step profiler offering a complete suite of 2d analysis features for surface topography analysis.
During our refurbishing process we will complete an inspection of the tool and replace any items that are going bad or are known to go bad in the future. Step heights can range from 20nm to 160um, with scan lengths up to 10mm. Klatencor alphastep 200 micronano fabrication center. For more complex measurements, refer to the tencor alphastep 500 profiler manual which may be downloaded from the docs section of the as500 equipment page of the nrf web site. The alphastep is a mechanical, stylusbased step profiler that can measure step heights with subangstrom resolution. Klatencor corporation one technology drive milpitas, ca 95035 phone 408. Nrf tencor alphastep as500 sop revision 2 092017 page 2 of 7 note. Tencor alphastep 200 surface profiler bmi surplus, inc. Tencor alphastep series profilers as200, as250, as300, as500 prometrix resistivity rs series rs35, rs35a, rs55, rs55tc, rs55tca, rs75, rs100 prometrix film measurement uv series uv1050, uv1070, uv1250, us1280se, f5x, spectra fx, spectra fx100200 tencor high resolution profiler hrp series 100, 200, 240, 300, 340. Included is a reference standard step and test data from tencor, although the. The alphastep 200 is a computerized step profiler with a programmable xy stage, and a 9 video monitor which displays a magnified view of the sample and stylus during the scan, as well as scan profiles and a summary of scan data. Klatencor alphastep 200 as200 alphastep step surface profilometerprofiler the system was removed from service in working condition.
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